By Emmanuel Defaÿ
After detailing the fundamental thermodynamic concept utilized to high-K dielectrics skinny movies together with extrinsic results, this booklet emphasizes the specificity of skinny movies. Deposition and patterning applied sciences are then awarded. a complete bankruptcy is devoted to the main position performed within the box through X-Ray Diffraction characterization, and different characterization innovations also are defined reminiscent of Radio frequency characterization. An in-depth learn of the effect of leakage currents is played including reliability dialogue. 3 applicative chapters disguise built-in capacitors, variables capacitors and ferroelectric stories. the ultimate bankruptcy bargains with a pretty new study box, multiferroic skinny films.
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Ferroelectric Dielectrics Integrated on Silicon by Emmanuel Defaÿ