William B. Glendinning,John N. Helbert's Handbook of VLSI Microlithography: Principles, Technology PDF

By William B. Glendinning,John N. Helbert

ISBN-10: 0815512813

ISBN-13: 9780815512813

This instruction manual provides readers an in depth examine the total know-how of printing very excessive answer and excessive density built-in circuit (IC) styles into skinny face up to strategy move coatings-- together with optical lithography, electron beam, ion beam, and x-ray lithography. The book's major subject matter is the certain printing method had to in achieving quantity excessive density IC chip creation, specifically within the Dynamic Random entry reminiscence (DRAM) undefined.

The booklet leads off with a comparability of assorted lithography equipment, overlaying the 3 significant patterning parameters of line/space, answer, line part and trend function measurement regulate. The book's clarification of face up to and face up to procedure apparatus know-how could be the 1st sensible description of the connection among the face up to strategy and kit parameters. the fundamentals of face up to know-how are thoroughly coated -- together with a complete bankruptcy on face up to technique defectivity and the capability yield restricting impression on gadget creation.

Each replacement lithographic strategy and trying out approach is taken into account and evaluated: easy metrology together with optical, scanning-electron-microscope (SEM) innovations and electric try out units, besides reasons of exact printing instruments and their layout, building and function. The editor devotes a whole bankruptcy to modern day subtle, advanced electron-beam printers, and to the rising x-ray printing expertise now utilized in high-density CMOS units. lively ion particle printing is a controllable, steerable know-how that doesn't depend on withstand, and occupies a last portion of the handbook.

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Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology) by William B. Glendinning,John N. Helbert

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