By William B. Glendinning,John N. Helbert
The booklet leads off with a comparability of assorted lithography equipment, overlaying the 3 significant patterning parameters of line/space, answer, line part and trend function measurement regulate. The book's clarification of face up to and face up to procedure apparatus know-how could be the 1st sensible description of the connection among the face up to strategy and kit parameters. the fundamentals of face up to know-how are thoroughly coated -- together with a complete bankruptcy on face up to technique defectivity and the capability yield restricting impression on gadget creation.
Each replacement lithographic strategy and trying out approach is taken into account and evaluated: easy metrology together with optical, scanning-electron-microscope (SEM) innovations and electric try out units, besides reasons of exact printing instruments and their layout, building and function. The editor devotes a whole bankruptcy to modern day subtle, advanced electron-beam printers, and to the rising x-ray printing expertise now utilized in high-density CMOS units. lively ion particle printing is a controllable, steerable know-how that doesn't depend on withstand, and occupies a last portion of the handbook.
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Extra info for Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology) by William B. Glendinning,John N. Helbert