By Norman G. Einspruch,Graydon B. Larrabee
This publication discusses a few of the characterization concepts, reminiscent of Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic method of the applied sciences of VLSI digital fabrics and machine manufacture also are considered.
This quantity is useful to fabrics scientists, chemists, and engineers who're commissioned with the accountability of constructing and imposing the construction of fabrics and units to help the VLSI era.
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Extra info for Materials and Process Characterization: 6 (VLSI Electronics Microstructure Science)
Materials and Process Characterization: 6 (VLSI Electronics Microstructure Science) by Norman G. Einspruch,Graydon B. Larrabee