Read e-book online Materials and Process Characterization: 6 (VLSI Electronics PDF

By Norman G. Einspruch,Graydon B. Larrabee

ISBN-10: 0122341066

ISBN-13: 9780122341069

VLSI Electronics: Microstructure technological know-how, quantity 6: fabrics and method Characterization addresses the matter of ways to use a extensive diversity of refined fabrics characterization instruments to fabrics and methods used for improvement and creation of very huge scale integration (VLSI) electronics.

This publication discusses a few of the characterization concepts, reminiscent of Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic method of the applied sciences of VLSI digital fabrics and machine manufacture also are considered.

This quantity is useful to fabrics scientists, chemists, and engineers who're commissioned with the accountability of constructing and imposing the construction of fabrics and units to help the VLSI era.

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Materials and Process Characterization: 6 (VLSI Electronics Microstructure Science) by Norman G. Einspruch,Graydon B. Larrabee


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